Environmental Probe Station, Oxygen Free, Hot Chuck with Cooling
Product Code: 68156
Manufacturer: EverBeing
The Everbeing Chamber Plus series of analytical probe stations is an extension of their flagship EB Series probe station.
Take your DC and RF measurements further with complete temperature control from 5°C to 400°C (depending on hot chuck model), can also go as low as -40°C. Nitrogen purge to remove moisture.
The EverBeing EB series is our top of the line probe station. The features and foundation are solid for providing repeatable, accurate measurements in both DC and RF applications.
Environmental Probe Station with Vacuum Chuck available in 4″, 6″, 8″, 12″ Wafer diameter
- Large Knob for High Precision Stage
- Back-lash free movement
- Mounting for up to 8 micropositioners
- 4.5” Probe Card Holder compatible
- Platen Z-Motion Range 6mm Pneumatic
- Platen Fine resolution 1 µm
- Micropositioner Standby Dock
- Microscope Stage Travel Range 2” X 2” (50 X 50mm)
- Stainless Steel or Gold Plated Vacuum Chuck
| Station Footprint | 760mm W x 660mm D |
| Station Height | 450mm (to Platen)/700mm (to Microscope) |
| Station Weight | 80kg |
| Platen Material | Hard Chrome Plated Steel |
| Platen Dimension | 250mm inner, 450mm outer |
| Platen Capacity | 8DC or 4RF 4DC |
| Position Mount | Magnetic ON/OFF switch |
| No. of Vacuum Switches | 4 |
| Platen Z-Motion Range | 6mm Pneumatic |
| Platen Z-Fine Resolution | 1μm |
| Platen Z Movement | Gear and Belt (Fine, Lever (Coarse) |
| Chuck Material | Stainless Steel |
| Chuck Stage Type | Large Knob Precision Movement |
| Chuck Travel Range | 6″ x 6″ |
| Chuck Quick Movement | Quick Y Rail Movement for Easy Sample Loading |
| Chuck Fine Resolution | 1 μm |
| Chuck Theta Coarse Travel | 20° |
| Chuck Theta Fine Resolution | 001° |
| Large Knob Chuck Movement | High Precision Linear Stage |
| Chuck Size | 6″ (150mm) |
| Chuck Planarity | 3 μm |
| Chuck Rigidity | 15 μm/10N@edge |
| Chuck Vaccum Grooves | Centre, 0.5″, 1.5″, 2.5″ (Individually Controlled) |
| Chuck Bias Capacity | Up to 2kV |
| Chuck Isolation | 5 GΩ |
| DUT Size Range | 2mm – 150mm |
| Microscope Stage Type | High Precision Linear Stage |
| Microscope Stage Resolution | 1 μm |
| Microscope Stage Travel Range | 2″ x 2″ |
| Microscope Tilting (Optional) | 35″ |