• Vacuum Chuck: 
• 4″, 6″, 8″, 12″ Wafer (Wafer size ) 
• Stainless Steel/Gold Plated Vacuum Chuck 
• Sample size: 5x5mm~4″, 6″, 8″, 12″
• Chuck Flatness: 10um 
• Chuck Fine Theta: 30? 

• Backlash Free Movement X-Y Stage 
• X-Y Movement: 4×4″, 6×6″, 8×8″, 12×12″ 
• X-Y Stage Resolution: 10um 
• ???? ? Option Item: 
• Microscope X-Y Stage 
• Microscope Tilting(Up/Down) 
• Probe Card Holder 
• Streo-Microscope
• RF/Active Probing (PicoProbe)