• Gold Plated Vacuum Chuck: 4″ 6″, 8″, 12″
• Sample Size: 5x5mm ~ 4″ 6″, 8″, 12″
• Chuck Flatness: 10um
• Chuck Theta: ±15°
• Chuck Quick Y Stage for easy loading/unloading the samples
• Huge Knob X-Y Stage: 1um resolution
• Platen Lever/Knob Up/Down
• Microscope Tilting for easy revolving objectives

Accessory Part
• Microscope Tilting Mechanism 
• RF Probes/Cables 
• Active Probes 
• Low Current/Capacitance Probes 
• High Voltage Probe 
• Laser Cutter 
• Ultrasonic Cutter 
• CCD/Digital Camera with USB Connection 
• Probe Card/Package Device/PCB Holder 
• Thermal Systems 
• Liquid Crystal Kit 
• Vibration Free Table 
• Shielding Box 
• Test Bench 
• Dark Field/Normarski Inspection 
• Photon Emission Microscope System