‧ Substrate Size: 500mm*400mm
‧ High Magnification Microscope: EP.10~20X, Zoom.1~2X,   OB.2X, 10X, 20X, 50X…
‧ Chuck Theta 
‧ Linear Quick Z Pneumatic Up/Down
‧ Microscope X-Y Stage
‧ Encording Positioning Display with Sub-micron Resolution
‧ Large Area Platen
‧ 1um Resolution Micropositioner 
‧ Vibration Isolation