• Chuck Size: 6″
• Chuck Planarization: +/- 10um
• Temp. Range: Ambient ~ 100/150/200/300/400/500/600/70°C
• Temp. Accuracy: +/- 0.5°C
• Power to Heat: DC
• Material: Stainless Steel
• Dimension: 350mmW X 300mmD X 150mmH (Controller), Weight: 20 Kg

• pA Measurement Kit
• Water Cooling Tank
• Refrigeration Cooling Unit
• Gold Plated Chuck
• Nickel Plated Chuck
• RS232/GPIB Interface Kit

• Power source: 220V 50/60Hz
• Oil tank condenser: 2/1 TON
• Motor horsepower: 2/1 HP
• Fan horsepower: 2/1 HP
• Pump discharge rate: 30 I/min
• Water tank: 26 I/min
• Rated current: 3.3 amps
• Pipe size: 2/1″ x 2/1″
• Dimension: 360mm(D) x 460mm(W) x 415mm(H)
• Weight: 32 Kg
• Warranty: 1 year