Cryogenic Prober Station(CG-196CU)
‧ Temperature Range: 77degK ~ 480degK
‧ Micropositioner: 4~6sets
‧ Wide working distance
‧ 10um resolution
‧ Vacuum Pump: 10^-3 (standard) with Vacuum sensor
‧ Temperature Controller
‧ Thermo-couple @ certain position & Thermo-meter
‧ 50L Nitrogen Dewar
‧ Include connecting for liquid-nitrogen & nitrogen gas
‧ etc…
‧ Sub-pA Leakage Level
‧ Vibration Isolation
‧ High Vacuum Pump & Chamber
‧ Microscope Bridge