• Substrate Size: Large Substrate (ex, 1300x900mm)
• High Magnification Microscope:
EP.10~20X, Zoom.1~2X, OB.2X, 10X, 20X, 50X…
• Chuck Theta
• Linear Quick Z Pneumatic Up/Down
• Microscope X-Y Stage
• Encording Positioning Display with Sub-micron Resolution
• 4 Platen for Micropositioner ( 2 Left, 2 Right)
• 1um Resolution Micropositioner
• Vibration Isolation