Temperature control vacuum stage for ellipsometry systems


Linkam’s THMS system, one of the most widely used heating and freezing stages
available, has been modified with a special optical adapter to facilitate use on an
ellipsometer. Developed in collaboration with some of the world’s leading
ellipsometer manufacturers, the THMSEL350V has been optimised to eliminate
sample condensation at low temperature by vacuum and allow optimal optical
access to the sample. The THMSEL350V Ellipsometer Cryo Vacuum System
features the THMSEL350V Ellipsometer stage, the stand-alone LinkPad controller
and LNP96 liquid nitrogen cooling system.

Samples loaded onto a 0.17mm cover slip are placed on a nickel plated heating
element to ensure exceptional heat transfer and extremely sensitive temperature
measurement. A platinum resistor sensor, accurate to 0.01°C, provides a more
accurate and stable temperature signal than can be achieved with a thermocouple.

Samples are quickly characterised by heating to within a few degrees of the
required temperature at a rate of up to 30°C/min with no overshoot, then slowed
down to a few tenths of a degrees per minute to closely examine sample changes.
Optional LINK software provides complete control of the system and additionally
allows you to export experimental data as a CSV file.


  • Temperature range < -195°C to 350°C
  • Up to 30°C/min heating
  • Temperature stability <0.1°C
  • 16mm XY sample manipulation
  • Sample area 22mm diameter
  • Gas tight chamber for atmospheric control
  • 100 Ohm platinum resistor sensor
  • Light aperture – 1.3mm Ø
  • Nickel plated copper block for high thermal conductivity
  • Direct injection of the coolant into the copper block