Vacuum Chuck:
•4″, (±10um flatness)
•3 Vacuum lines for different sample size
•Sample size: 5x5mm~4″
•Platen for 6 Micropositioner

Microscope:
•Trinocular Stereo-microscope
•Eye0.7~4.5
•Total Magnification: 14~90X
•Fluorescent Light

•Chuck X-Y Stage & Chuck Up/Down
•Microscope upgrade for 135X or 200X max. magnification
•CCD/Digital Camera
•Micropositioner/Manipulator
•Tip Holder
•Probe Tip